High Density Circuit Technology

Generated Summary

ALTHOUGH IT IS RECOGNIZED THAT CERTAIN PORTIONS ARE ILLEGIBLE, IT IS BEING RELEASED IN THE INTEREST OF MAKING AVAILABLE AS MUCH INFORMATION AS POSSIBLE V E. Wade Prepared for George C. Marshall Space `light Center Marshall Space Flight Center, Alabama 15312 by Thomas E. Wade Principal Investigator 1 Microelectronics Pesearch LaboraLory Mississippi State University Department of Electrical Engineering Mississippi State, Mississippi 1976?TABLE OF CONTENTS Page I. 11iI.INTRODUCTION Progress has been accomplished in all of the proposed areas as listed under the Scope of Work, Exhibit A, Contract NAS8-33448. Some delays have been experienced due to metal deposition equipment malfunctions and start-up procedures associated with the Mississippi State Microelectronics Research Laboratory. It is felt that many of these problems have been eliminated to the extent that normal progress will be rendered during the next contract quarter. In accordance with the contracts "Report Requirements" section which states "quarterly reports shall be in narrative form, and brief and informal in content", the following research areas of emphasis will be addressed. MULTI-LEVEL METAL TECHNIC

Category

Engineering

NASA NTRS Link

https://ntrs.nasa.gov/citations/19810023782